Fabrication method of semiconductor integrated circuit device and testing method

ABSTRACT

Semiconductor integrated circuit device fabricating method and testing method are provided. A probe inspection system is used wherein a network including probers, testers, manufacturing specification management, testing step control and test results management is constructed and which has a modified prober software. Lots are set successively to cassettes, and when the lot in the other cassette is set after the end of processing of the lot in one cassette, the processing of the next lot is executed automatically. A continuous lot inspection can be effected by repeating these operations. Even during processing of the next lot, it is always possible to change lot in the processing-completed cassette and input data such as lot No. In probe check in a wafer testing step it is possible to diminish the working load and wait of workers in lot change, reduce the number of cassettes and improve the working efficiency of testers. Particularly, application to a variety of items in the unit of prober can be done in a satisfactory manner.

BACKGROUND OF THE INVENTION

[0001] The present invention relates to a technique for fabricating a semiconductor integrated circuit device and more particularly to a technique which is effective in its application to a wafer testing step including probe check.

[0002] According to studies made by the present inventor in connection with the fabrication of a semiconductor integrated circuit device, for example such techniques as disclosed in Japanese Unexamined Patent Publication Nos. Hei 5(1993)-343497 and 5(1993)-136219 are mentioned as techniques associated with a wafer testing step including probe check.

[0003] For example, in the former publication of No. Hei 5(1993)-343497 there is disclosed wafer inspection equipment provided with plural wafer inspection units and a cassette stock unit, wherein wafers stored in a predetermined cassette out of plural cassettes stocked in the cassette stock unit are taken out one by one from the cassette and conveyed for inspection to the plural wafer inspection units respectively by wafer conveyance means, then are conveyed successively, beginning with one having been checked in any of the wafer inspection units, to the original cassette and are received therein.

[0004] In the latter publication of No. Hei 5(1993)-136219 is disclosed inspection equipment provided with plural inspection mechanisms and a probe card conveying mechanism wherein inspection is carried out under successive loading and unloading of wafers with respect to the plural inspection mechanisms and a predetermined probe card is conveyed and automatically loaded to each inspection mechanism by the probe card conveying mechanism in accordance with the type of wafer, allowing inspection to be carried out.

SUMMARY OF THE INVENTION

[0005] Having studied the above technique on the wafer testing step including probe check, the present inventor has found out the following facts.

[0006] For example, according to the technique disclosed in the former publication of No. Hei 5(1993)-343497, plural cassettes and plural wafer inspection units are controlled in a centralized manner so that many wafers received in a predetermined cassette are conveyed to an empty wafer inspection unit and checked therein, thereby shortening the inspection time required for each cassette. This technique is suitable mainly for limited item mass production but is not considered suitable for multiple-item production. Particularly, no consideration is given to the application to a variety of items for each wafer inspection unit, nor is given any consideration to the replacement of test programs corresponding to various items.

[0007] According to the technique disclosed in the latter publication of No. Hei 5(1993)-136219, a predetermined probe card is conveyed to each inspection mechanism in accordance with the type of wafer and inspection is carried out, whereby also in a multi-item low-volume production the inspection of wafer is carried out efficiently to improve the production efficiency. In this technique there is specified a correlation between an inspection mechanism and a probe card in accordance with the type of wafer and it is necessary to provide inspection mechanisms and probe cards in a number corresponding to the number of items, so that the scale of inspection equipment may become larger. Besides, any consideration is given neither to the application to a variety of items for each wafer inspection unit nor to the replacement of test programs corresponding to various items. Moreover, the wafer conveying unit used becomes larger in scale, giving rise to problems in point of investment and space.

[0008] Further, in such a probe check in the wafer testing step as referred to above, wafers are set to a prober in the unit of lot and a program is loaded to carry out probe check. In this case, lot is changed upon completion of one lot's inspection and, if the change of program is necessary, a program is re-loaded manually to cope with a multi-item inspection. Since the inspection is thus carried out lot by lot, there are working loads such as raising and lowering lots and changing program; besides, there occurs a wait of worker, with consequent lowering in the working efficiency of the tester. Additionally, a maximum of twenty-five wafers can usually be received in one cassette, but in a multi-item production there sometimes is a case where the number of item is one and the number of wafers is small. Since management is made in the unit of one lot and one cassette, the number of cassettes increases, leading to an increase of the working loads and a lowering of the working efficiency. One lot No. covers fixed one item or may cover a plurality of items.

[0009] In view of the above-mentioned point the present inventor has hit upon forming a network which covers probers, testers, manufacturing specification management, tersting step control and test results management and modifying the prober's software. As a result, a large-scale wafer conveying unit is not needed, and by the application to various items in the unit of prober and by automatic replacement of test programs corresponding to various items, it becomes possible to reduce the working loads during lot replacement and reduce the number of cassettes and further becomes possible to realize probe check for plural lots which leads to the improvement in the working efficiency of the testers.

[0010] It is an object of the present invention to provide a semiconductor integrated circuit device fabricating method and a testing method which, in probe check in a wafer testing step, can reduce working loads and wait of worker in lot replacement, reduce the number of cassettes and improve the tester working efficiency and which permits application to a variety of items in the unit of prober.

[0011] The above and other objects and novel features of the present invention will become apparent from the following description and the accompanying drawings.

[0012] Typical inventions, out of those disclosed herein, will be outlined below.

[0013] According to the present invention, for achieving the above-mentioned object, there is formed a network including probers, testers, manufacturing specification management, testing step control and test results management, the prober's software is modified, {circle over (1)} the manufacturing specification in a probe checking step is set under a unitary management (in terms of data file) and manufacturing specification information in probe check for each lot and each wafer in a cassette is fed to a tester, {circle over (2)} program selection, as well as prober's item parameter and measurement temperature, are controlled automatically in the tester on the basis of the manufacturing specification information in probe check, {circle over (3)} the storage of probe check results to a storage medium (e.g. FD) is abolished in a test results acquiring network, {circle over (4)} and by modification of the prober's software a lot switching work is normally rendered automatic to reduce the working time and make the operation stop time zero, further, the number of cassettes is decreased. There is no one-lot one-cassette limitation, with plural lots and plural items capable of being received in one cassette.

[0014] More specifically, in one aspect of the present invention there is provided a semiconductor integrated circuit device fabricating method including a wafer processing step of forming a predetermined integrated circuit on a wafer, a wafer testing step in which, after the end of processing of a predetermined cassette as one cassette out of plural cassettes each accommodating the wafer with the integrated circuit formed thereon, the predetermined cassette is replaced with another cassette and the wafer is subjected to an electrical characteristic test, and a product shipping step of shipping as product the wafer if judged to be non-defective as a result of the electrical characteristic test.

[0015] In another aspect of the present invention there is provided a semiconductor integrated circuit device fabricating method wherein, as the wafer testing step, data of each lot and each wafer in a cassette which accepts the item of the wafer with the integrated circuit formed thereon are automatically replaced with a test program corresponding to each item in a unitarily managed state on a network with representative lot No. as key and the electrical characteristic test for the wafer is carried out, or the same test is carried out while probe trace image data of a prober for the integrated circuit-formed wafer are checked off-line, or when such wafers with the integrated circuit formed thereon are accommodated in plural items and plural lots into a cassette, an automatic change is made into test programs corresponding to the items and the electrical characteristic test for the wafer is carried out.

[0016] In a further aspect of the present invention there is provided a semiconductor integrated circuit device testing method including a step of providing a wafer with a predetermined integrated circuit formed thereon, a step in which, after the end of processing of a predetermined cassette as one cassette out of plural cassettes each accommodating the wafer with the integrated circuit formed thereon, the predetermined cassette is replaced with another cassette and the wafer is subjected to an electrical characteristic test, and a step of shipping as product the wafer if judged to be non-defective as a result of the electrical characteristic test.

[0017] In a still further aspect of the present invention there is provided a semiconductor integrated circuit device testing method wherein, as the step of carrying out the electrical characteristic test, data of each lot and each wafer in a cassette which accepts the item of the wafer with the integrated circuit formed thereon are automatically replaced with a test program corresponding to each item in a unitary managed state on a network with representative lot No. as key and the electrical characteristic test for the wafer is carried out, or the same test is carried out while probe trace image data of a prober for the integrated circuit-formed wafer are checked off-line, or when such wafers with the integrated circuit formed thereon are accommodated in plural items and plural lots into a cassette, an automatic change is made into test programs corresponding to the items and the electrical characteristic test for the wafer is carried out.

BRIEF DESCRIPTION OF THE DRAWINGS

[0018]FIG. 1 is an explanatory diagram showing a concept of a continuous prober's check for lots in a wafer testing step in a semiconductor integrated circuit device fabricating method according to the present invention;

[0019]FIG. 2 is a flow chart showing a semiconductor integrated circuit device fabricating method embodying the present invention;

[0020]FIG. 3 is a flow chart showing probe check in a semiconductor integrated circuit device testing method embodying the present invention;

[0021]FIG. 4 is a block diagram showing a probe inspection system for effecting probe check in the semiconductor integrated circuit device testing method embodying the present invention;

[0022]FIG. 5 is a configuration diagram showing a prober which constitutes a probe inspection system embodying the present invention;

[0023]FIG. 6 is an explanatory diagram showing a flow of operations of the prober;

[0024]FIG. 7 is a flow chart showing the generation of start signals transmitted from the prober to a tester;

[0025]FIG. 8 is a block diagram for explaining an automatic program loading function in the probe inspection system;

[0026]FIG. 9 is a block diagram for explaining automatic jig changing and parameter setting functions of the prober in the probe inspection system;

[0027]FIG. 10 is a block diagram for explaining a test results collecting function in the probe inspection system;

[0028]FIG. 11 is a block diagram for explaining a probe trace centralized management and control function in the probe inspection system;

[0029]FIG. 12 is a block diagram for explaining a trouble detecting and operation monitoring function in the probe inspection system; and

[0030]FIG. 13 is a block diagram for explaining automatic lot coveying and lot No. setting functions in the probe inspection system.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

[0031] In the following embodiments of the present invention the same or similar portions once explained will not be explained repeatedly in principle except when repeated explanations are needed.

[0032] In the following embodiments, explanations will be given in a divided manner into plural sections or plural embodiments when necessary for convenence' sake, but unless otherwise mentioned, they are not unrelated to each other, but are related such that one is a modification, detail, or supplemental explanation of a part or the whole of the other.

[0033] In the following embodiments, moreover, when reference is made to the number of elements (including number of pieces, numerical value, quantity, and range), no limitation is made to that specific number, but numerals above and below the specific number will also do unless limitation to the specific number is specially mentioned or is inevitable basically.

[0034] Further, it goes without saying that the components (including constituent steps) in the following embodiments are not always essential except the case where they are specially mentioned to be essential or are clearly considered to be essential basically.

[0035] Likewise, it is to be understood that when reference is made to the shapes and positional relations of components in the following embodiments, those substantially similar closely or similar to such shapes, etc. are also included unless otherwise mentioned or otherwise considered basically. This is also the case with the foregoing numerical value and range.

[0036] Embodiments of the present invention will be described in detail hereinunder with reference to the drawings. In all the drawings for illustrating the embodiments the members having the same functions are identified by the same reference numerals and repeated explanations thereof will be omitted.

[0037] (1) The semiconductor integrated circuit device as referred to herein covers not only those formed on a silicon wafer but also those formed on other substrates such as TFT liquid crystal unless otherwise mentioned.

[0038] (2) The wafer as referred to herein covers a generally disc-like or rectangular single crystal silicon wafer used in the manufacture of a semiconductor integrated circuit device, SOI, substrates having a composite structure with other insulating materials, and glass substrate used in the manufacture of TFT.

[0039] First, with reference to FIG. 1, an explanation will now be given about an example of a concept of starting a continuous prober's check for lots in a wafer testing step in a method for fabricating a semiconductor integrated circuit device embodying the present invention. FIG. 1 is an explanatory diagram showing a concept of a continuous prober's check for lots. In the illustrated example, lots A, B and C of different manufacturing specifications are subjected to processing in a construction having two cassettes which accommodate wafers having formed hereon integrated circuits to be measured. It goes without saying that the example about to be described is also applicable to a construction having three or more cassettes and the case where two or four or more types of lots are to be subjected to processing.

[0040] As shown in FIG. 1, when starting a continuous prober's check for lots, first Lot A is set to cassette (1) side and the processing thereof is started. During this processing of Lot A, Lot B is set to cassette (2) side and assumes a stand-by state. When the processing of Lot A set to the cassette (1) side is over, the processing of Lot B set to the cassette (2) side and being in a stand-by state is started. During this processing of Lot B, the lot on the cassette (1) side is replaced, that is, Lot A is replaced with Lot C, which Lot C is set and assumes a stand-by state. When the processing of Lot B set to the cassette (2) side is over, the processing of Lot C set to the cassette (1) side and being in a stand-by state is started in the same manner.

[0041] Thus, in the probe check in the wafer testing step according to the present invention, Lots A, B and C are set successively to the cassettes (1) and (2), and after the end of lot processing in one cassette and while the lot in the other cassette is set, the processing of the next lot is carried out automatically. By repeating this operation it is made possible to effect a continuous processing of lots. Even during processing of the next lot, it is normally possible to make lot change for the cassette whose processing has been completed and data input such as lot No. input.

[0042] Even when different types of lots are set to the same cassette, it is possible to perform a lot switching work automatically, thereby making a continuous lot check particularly in a multi-item production and reducing the number of cassettes, by automatically controlling the selection of a test program for a tester, as well as prober set temperature and item parameter, at the time of change of each lot and wafer correspondingly to each lot and wafer managed lot by lot in each cassette and on the basis of fabricating specification information in probe check which information is unitarily managed on a network.

[0043] The term “lot” as referred to herein means handling the same item as one group in accordance with a semiconductor integrated circuit device fabricating specification. Likewise, different lot indicates a different item, and switching lot means switching to a lot of different lot No. of a different or the same item.

[0044] Next, an example of the semiconductor integrated circuit device fabricating method of this embodiment will be described with reference to FIG. 2, which is a flow chart showing a semiconductor integrated circuit device fabricating method.

[0045] (1) In a wafer processing step (S101), a logic or a memory, or a predetermined integrated circuit as a combination of the two, is formed on wafer. More specifically, in accordance with the specification of a semiconductor integrated circuit device, processings such as oxidation, diffusion, impurity introduction and formation of wiring pattern, insulating layer and wiring layer, are repeated for the wafer in accordance with the specification of a semiconductor integrated circuit device to be formed, thereby forming an integrated circuit for each of plural chips disposed in a lattice shape on the wafer.

[0046] (b 2) In a wafer testing step (S102), the wafer having gone through the wafer processing step is subjected to burn-in, probe check, and redundancy repair processing. Burn-in is a test in which a rated or higher temperature and voltage stress are applied for screening of a chip which is likely to become defective. In the probe check there are conducted a function test for checking whether a logic or a memory, or an integrated circuit as a combination of the two, fulfills a predetermined function or not, as well as an open/short test between input and output terminals, a leak current test, a DC test such as measurement of a supply current, and an AC test for testing an AC timing. The redundancy repair processing is for repairing and relieving a chip judged to be defective as a result of the probe check, by the application of a laser beam for example.

[0047] In the present invention, though the details will be described later, a characteristic feature resides in the probe check after the wafer testing step. In the unit of prober and in the unit of one cassette out of plural cassettes each containing wafers with integrated circuit formed thereon, a predetermined cassette is replaced with another cassette after the end of processing of the predetermined cassette and it is thereby made possible to continuously conduct a electrical characteristic test for the wafers.

[0048] (3) In a product shipping step (S103), wafers found to be non-defective as a result of the wafer testing step are shipped as products. As the products are included various forms of products such as non-defective wafers as they are, non-defective chips alone obtained by cutting each wafer into individual chips, and packages or modules obtained by assembling non-defective chips. The products can be offered to users each as a semiconductor integrated circuit device in the state of wafer, chip, or package or module.

[0049] Next, with reference to FIG. 3, a description will now be given of an example of probe check in the semiconductor integrated circuit device testing method of this embodiment. FIG. 3 is a flow chart showing probe check in the semiconductor integrated circuit device testing method. The illustrated example is of a construction having two cassettes—cassette (1) and cassette (2)—in starting a continuous prober's check for lots in the wafer testing step shown in FIG. 2.

[0050] (1) In step S201, Lot A and Lot B are set to cassette (1) side and cassette (2) side, respectively, in a prober. Setting of Lot B is not always required to be simultaneous with that of Lot A.

[0051] (2) In step S202, a probe check specification is directed to the prober on the basis of auotmatic load data (manufacturing specification information such as jig, measurement temperature, and item parameter).

[0052] (3) In step S203, if there is any change of jig, measurement temperature, etc., switching is made automatically.

[0053] (4) In step S204, a program is loaded automatically upon occurrence of a change of program by automatic load data.

[0054] (5) In step S205, probe check is executed.

[0055] (6) In step S206, after the end of processing of Lot A, the prober shifts to processing of Lot B and executes the same processings as in the foregoing steps S202 to S205.

[0056] (7) In step S207, the prober issues an alarm indicating the end of processing of Lot A. This alarm is distinguished from other alarms because a lowering of the tester working efficiency does not result even without immediate execution of processing.

[0057] (8) In step S208, the worker switches Lot A to Lot C.

[0058] (9) In step S209, after the end of processing of Lot B, the prober shifts to processing of Lot C and executes the same processings as in the foregoing steps S202 to S205.

[0059] Then, after the end of processing of Lot C, the prober shifts to processing of Lot D and, also for this and succeeding lots, repeats the same processings as in the foregoing steps S202 to S205.

[0060] In this way, Lots A, B, C, D, . . . are set successively to the cassettes (1) and (2), and if the other cassette is set after the end of processing of one cassette, the operation of processing the next cassette is repeated automatically, whereby the lots set in the cassettes can be subjected to processing in a continuous manner.

[0061] In this connection, if wafers of one item of lot are accommodated in one cassette, the processing of each lot can be carried out cassette by cassette. On the other hand, if wafers of plural, two, for example, types of lots like Lots A and B are accommodated in one cassette, it is possible to perform a lot switching work automatically and process each lot continuously by automatically controlling the selection of a prober's test program and measurement temperature at the time of change from Lot A to Lot B correspondingly to the lots which are managed lot by lot in the cassette. This is made possible because in the automatic load data the wafers received in each cassette are managed lot by lot.

[0062] Next, with reference to FIG. 4, a description will be given below of an example of a probe inspection system for realizing probe inspection in the semiconductor integrated circuit device testing method of this embodiment. FIG. 4 is a block diagram showing the probe inspection system.

[0063] As shown in FIG. 4, the probe inspection system according to this embodiment is composed of plural probers 1, plural testers 2, a host computer 3, a PC (personal computer) 4 for manufacturing specification acceptance, a PC 5 for post-step delivery, a PC 6 for probe trace centralized control, a PC 7 for test results collection, a PC 9 for operation monitor, operation monitors 10, and a PC 11 for trouble detection/operation monitor display. The host computer 3 is connected through a network 12 to each of the testers 2, PC 4 for manufacturing specification acceptance, PC 5 for post-step delivery, PC 6 for probe trace centralized control, PC 7 for test results collection, PC 9 for operation monitor, and PC 11 for trouble detection/operation monitor display.

[0064] The plural probers 1 are of different types according to manufacturing specifications including testing conditions of an electrical characteristic test or of the same type. One or plural probers 1 are connected to each tester 2. The probers 1 are each for testing chip by chip an electrical characteristic of a predetermined integrated circuit formed on a wafer in the wafer processing step. A probe of a probe card is brought into contact with an electrode of each chip and an electrical characteristic test for the chip is conducted with an external tester 2 connected to the probe.

[0065] The plural testers 2 are of different types corresponding to the probers 1 or of the same type. They are each connected to one or plural probers 1 and also connected to the network 12. The testers 2 are each loaded from the network 12 with a test program and a test pattern for testing an electrical characteristic of a wafer and judge on the basis of the result of the test whether each chip is non-defective or defective. The chips on the wafer are judged and distinguished between non-defective and defective each individually.

[0066] The host computer 3 is connected through the network 12 to each of the testers 2, PC 4 for manufacturing specification acceptance 4, PC 5 for post-step delivery, PC 6 for probe trace centralized control, PC 7 for test results collection, PC 9 for operation monitor, and PC 11 for trouble detection/operation monitor display. For the entire probe inspection system the host computer 3 stores automatic load data on manufacturing specification from the PC 4 for manufacturing specification acceptance and also stores data associated with the electrical characteristic test such as test program, test pattern and test results. Each tester 2 and each PC are controlled for processing and calculation on the basis of automatic load data and test results.

[0067] The PC 4 for manufacturing specification acceptance is connected to the network 12. The PC 4 for manufacturing specification acceptance has a manufacturing specification data base and issues a control card (describing a process flow) used at the time of lot acceptance. To the manufacturing specification data base is inputted product by product a manufacturing specification comprising such data as process flow associated with probe check, jig, program, and parameter name, which manufacturing specification is managed in a unitary manner. These data are inputted to the data base by reading a control card in which is stored a manufacturing specification associated with probe check product by product. This manufacturing specification is filed lot by lot and is transmitted as automatic load data to the host computer 3. The contents of the automatic load data coincide with that of the manufacturing specification data base.

[0068] The PC 5 for post-step delivery is connected to the network 12 with the host computer 3 connected thereto. The PC 5 is for outputting a pellet inspection slip when delivering a wafer to a post-step after the end of probe check or for transmitting over the network 12 the result of test to the host computer which is on-lined to the post-step.

[0069] The PC 6 for probe trace centralized control is connected to the network 12 with the host computer 3 connected thereto. The PC 6 displays a probe trace image transmitted from a prober 1, sends to the prober 1 adjustment data obtained from the probe trace image, and confirms, modifies and controls a probing position in a centralized manner.

[0070] The PC 7 for test results collection is connected to the network 12 with the host computer 3 connected thereto. The PC 7 is for collecting test results wafer by wafer and sending the test results to the host computer 3. It is possible to make reference to past test results in a real time manner. In case of transmitting test results from a tester 2 through the network 12, there is no transmission from the PC 7 for test results collection.

[0071] The PC 9 for operation monitor is connected to the network 12 with the host computer 3 connected thereto and is also connected to the operation monitors 10 to transmit information from the operation monitors 10 to the host computer 3.

[0072] The operation monitors 10 are connected to the PC 9 for operation monitor and are also connected to the probers 1 to transmit information such as operation, fault and error stop of devices including testers 2 and probers 1 to the host computer 3 through the PC 9 for operation monitor constantly in the probe inspection step.

[0073] The PC 11 for trouble detection/operation monitor display is connected to the network 12 with the host computer 3 connected thereto to make a trouble detection display and an operation display after processing in the host computer on the basis of test results and operation information.

[0074] Next, with reference to FIGS. 5 to 7, the following description is now provided about an example of construction and operation of the probers which constitute the probe inspection system of this embodiment. FIG. 5 is a configuration diagram showing a prober, FIG. 6 is an explanatory diagram showing a prober operation flow, and FIG. 7 is a flow chart showing the generation of start signals tansmitted from the probers to the testers.

[0075] As shown in FIG. 5, each prober 1 is made up of a cassette (1) 21, a cassette (2) 22, a wafer conveyance system 23, and a measurement chuck 24. The prober 1 may be of an existing hardware configuration, but software thereof has been modified so as to be applicable to a multi-item continuous lot check in the unit of prober and so as to permit an automatic change of item parameters and measurement temperatures corresponding to various items.

[0076] The cassette (1) 21 receives therein a plurality of wafers 25 with a predetermined integrated circuit formed thereon in the wafer processing step. The cassette (1) 21 with such plural wafers 25 received therein is set to a predetermined position (the right upper corner in the figure) manually or automatically using a conveyance mechanism.

[0077] The cassette (2) 22, like the cassette (1) 21, also receives therein a plurality of wafers 25 with a predetermined integrated circuit formed thereon in the wafer processing step and is set to a predetermined position (the left upper corner in the figure).

[0078] The wafer conveyance system 23 moves between the cassettes (1) 21, (2) 22 and the measurement chuck 24, which movement comprises a combination of right- and leftward movements, clockwise and counterclockwise 90° rotations, and expansion and contraction of the chuck in the figure, to convey the wafers 25 received in both cassettes one by one to the measurement chuck 24 and let them return into the cassettes after probe check.

[0079] The measurement chuck 24 is for conducting probe check (probing a chip) of each of wafers which are conveyed one by one from the cassettes (1) 21 and (2) 22 by means of the wafer conveyance system.

[0080] In the prober 1 constructed as above, for example as to the cassette (1) 21, the wafer conveyance system 23 positioned centrally in its initial state is moved rightwards, the first wafer out of the plural wafers 25 received in the cassette (1) 21 is taken out by expansion and contraction of a chuck provided in the wafer conveyance system 23, then wafer conveyance system 23 is moved back to its central position and is thereafter turned 90° clockwise, and the wafer 25 is delivered to the measurement chuck 24 by expansion and contraction of the chuck in the wafer conveyance system 23, followed by probe check. After the end of the probe check, the wafer 25 is delivered from the measurement chuck 24 to the wafer conveyance system 23 by expansion and contraction of the chuck in the same system, then the wafer conveyance system 23 is turned 90° counterclockwise and is thereafter moved rightwards, and the wafer 25 is returned to the cassette (1) 21 by expansion and contraction of the chuck in the wafer conveyance system 23. Subsequently, the above operations are repeated to permit probe check for all (25 for example) wafers 25 accommodated in the cassette (1) 21 successively from the second wafer, the third, . . . .

[0081] Also as to the cassette (2) 22, the same operations as in the case of the cassette (1) 21 are performed except that the movement of the wafer conveyance system 23 is reversed. That is, the wafer conveyance system 23 positioned centrally in its initial state is moved leftwards, the first wafer out of plural wafers 25 accommodated in the cassette (2) 22 is taken out by expansion and contraction of the chuck in the wafer conveyance system 23, the same conveyance system is returned to its central position and is thereafter turned 90° counterclockwise, the wafer is delivered to the measurement chuck 24 by expansion and contraction of the chuck in the wafer conveyance system 23, and probe check is conducted. After the end of the probe check, the wafer 25 is delivered from the measurement chuck 24 to the wafer conveyance system 23 by expansion and contraction of the chuck in the same system, the wafer conveyance system 23 is turned 90° clockwise and is thereafter moved leftwards, and the wafer 25 is returned to the cassette (2) 22 by expansion and contraction of the chuck conveyance system 23. By repeating these operations it is possible to take out one by one the wafers 25 accommodated in the cassette (2) 22 and conduct probe check for all the wafers.

[0082] In the continuous lot check by the prober 1, as shown in FIG. 6, at a first start point the cassette (1) 21 side starts processing, then when this processing has proceeded and the processing on the cassette (1) 21 side is over, the cassette (2) 22 side starts processing subsequently, then when this processing has proceeded and the processing on the cassette (2) 22 side is over, the cassette (1) 21 side starts processing in the same manner as above. Thus, a control is made so that processings are carried out continuously as long as the cassettes (1) 21 and (2) 22 are set.

[0083] As shown in FIG. 7, start signals transmitted from the prober 1 to the tester 2 are generated in the following manner. The start signals include Lot Start, Wafer Start, Chip Test, Wafer End, and Lot End. Lot Start is provided at the time of measuring the first chip on the first wafer in one lot. Wafer Start is transmitted at the first chip on each wafer. Chip Test is transmitted at the second to the last chip on each wafer. This is the case of one-piece measurement. Wafer End is provided after the end of measurement of each wafer. This is called Dummy Start free of any measurement chip. Lot End is provided at the end of measurement of each lot. This is called Dummy Start free of any measurement chip.

[0084] After the start, there is made judgment as to whether the start signal is Lot Start or Wafer Start (step S301). If the start signal is found to be Lot Start or Wafer Start as a result of the judgment, Wafer Start signal is sent as usual to the tester 2 and there is made communication of lot information as usual (S302, S303). In this communication of lot information, information pieces such as lot No., wafer No., and prober name are transmitted to the tester. Subsequent receipt of Test End signal including category comes to an end (S304).

[0085] If the start signal is found to be neither Lot Start nor Wafer Start in step S301, a check is made to see whether the start signal is Chip Test or not (S305). If the answer is affirmative, Chip Test signal is sent to the tester 2 (S306). Subsequent receipt of Test End including category comes to an end (S307).

[0086] If the start signal is found to be not Chip Test in step S305, a check is made to see if the start signal is Wafer End or Lot End (S308). If the answer is Wafer End, Wafer End signal is sent to the tester 2 (S309). Subsequent receipt of Test End signal comes to an end (S310).

[0087] If the start signal is found to be Lot End in step S308, Lot End signal is sent to the tester 2 (S311). After receipt of Test End signal, a check is made to see if there is the next cassette (S312 and S313). If the answer is affirmative, a lot end of the cassette under processing is alarmed using a special alarm sound and the flow advances to the processing of the next cassette, in which a check is made to see if there is a change of Lot No. (S314 and S315). If the answer is affirmative, the processing comes to an end, while if the answer is negative, that is, if there is no change of Lot No., Lot No. acknowledge stop is assisted and the processing comes to an end (S316). If it turns out in step S313 that there is not next cassette, a lot end stop is alarmed and the processing comes to an end (S317).

[0088] Next, with reference to FIGS. 8 to 13, a detailed description will now be given about various functions in the probe inspection system according to this embodiment. The various functions include automatic program loading, automatic prober's jig change and parameter setting, collection of test results, centralized probe trace management and control, trouble detection and operation monitor, and automatic lot conveyance and lot No. setting.

[0089] First, with reference to FIG. 8, an example of an automatic program loading function will be described. FIG. 8 is a block diagram for explaining an automatic program loading function.

[0090] As shown in FIG. 8, the automatic program loading is for plural testers 2 and probers 1 for example in the configuration including probers 1, testers 2, host computer 3, PC 4 for manufacturing specification acceptance, and PC 5 for post-step delivery, in the probe inspection system shown in FIG. 4.

[0091] (11) A control card is issued at the time of lot acceptance in the wafer testing step. At this time, Automatic load data (manufacturing specification)/Lot unit is transmitted from the PC 4 for manufacturing specification acceptance to the host computer 3 ({circle over (1)})

[0092] (12) At the time of starting probe check, the worker inputs Lot No. to a prober 1 and starts the inspection ({circle over (2)}).

[0093] (13) At the time of starting probe check, information pieces such as lot No., wafer No., and prober name are transmitted from the prober 1 to the tester 2 ({circle over (3)}).

[0094] (14) The tester 2 receives automatic load data of the lot concerned from the host computer 3 ({circle over (4)}).

[0095] (15) The tester 2 loads a test program and a test pattern of the lot concerned from the automatic load data and starts probe check ({circle over (5)}).

[0096] (16) After the end of the probe check and at the time of outputting a pellet inspection slip (information of a non-defective product) the automatic load data for the host computer 3 is deleted by the PC for post-step delivery ({circle over (6)}).

[0097] Next, with reference to FIG. 9, an example of prober's automatic jig changing and automatic parameter setting functions will be described below. FIG. 9 is a block diagram for explaining both functions.

[0098] As shown in the same figure, the automatic jig change and automatic parameter setting are for plural probers 1 for example in the configuration including probers 1, testers 2, host computer 3, PC 4 for manufacturing specification acceptance, and jig stock 13, in the probe inspection system shown in FIG. 4.

[0099] (21) A control card is issued at the time of accepting a lot in the wafer testing step. At this time, Automatic load data (manufacturing specification)/Lot unit is sent from the PC 4 for manufacturing specification acceptance to the host computer 3 ({circle over (1)}).

[0100] (22) At the time of starting the probe check the worker inputs Lot No. to the prober 1 and starts inspection ({circle over (2)}).

[0101] (23) The prober 1 receives automatic load data of the lot concerned from the host computer 3 ({circle over (3)}).

[0102] (24) When there is any parameter change based on the automatic load data, the prober 1 receives parameter data from the host computer 3 and makes switching automatically ({circle over (4)}).

[0103] (25) When there is any jig change based on the automatic load data, the prober 1 takes out jig data from the jig stock 13 and makes switching automatically ({circle over (5)}).

[0104] Next, an example of the test results collecting function will be described with reference to FIG. 10, which is a block diagram for illustrating the same function.

[0105] As shown in FIG. 10, the collection of test results is for plural testers 2 and probers 1 for example in the configuration including probers 1, testers 2, host computer 3, and PC 7 for test results collection, in the probe inspection system shown in FIG. 4. With on-line to the post-step, the PC 5 for post-step delivery becomes unnecessary as the case may be. In this collection of test results there mainly is adopted a method involving transmission of test results from each tester 2 to the host computer 3, but it is also possible to adopt a method involving transmission of test results from the PC 7 for test results collection to the host computer 3. If test results are to be stored in another medium such as FD, this can be done using the PC 5 for post-step delivery or PC 7 for test results collection.

[0106] The former method of transmitting test results from each tester to the host computer 3 is carried out in the following manner.

[0107] (31) The tester 2 transmits test results to the host computer 3 in lot No./wafer No. unit or chip by chip ({circle over (1)}).

[0108] On the other hand, the latter method of transmitting test results from the PC 7 for test results collection to the host computer 3 is carried out in the following manner.

[0109] (31′) The tester 2 transmits test results chip by chip to the prober 1 ({circle over (1)}′).

[0110] (32′) The prober 1 transmits test results in lot No./wafer No. unit to the PC 7 for test results collection ({circle over (2)}′).

[0111] (33′) The PC 7 for test results collection transmits the test results provided from the prober 1 to the host computer 3 in lot No./wafer No. unit ({circle over (3)}′).

[0112] Next, an example of the probe trace centralized management and control function will be described below with reference to FIG. 11, which is a block diagram for illustrating the same function.

[0113] As shown in FIG. 11, the probe trace centralized management and control is for plural probers 1 for example in the configuraiton including probers 1, testers 2, host computer 3, and PC 6 for probe trace centralized management, in the probe inspection system shown in FIG. 4. The probe trace centralized management and control is usually not performed for the improvement of running throughput as in the continuous lot check, but is performed in a temporarily wait state on such a specific occasion as lot switching, jig switching, or set temperature switching. Probe check is started after confirmation of a probe trace.

[0114] (41) During the probe check, the probe trace image is filed at a predetermined frequency by the prober 1 and the resulting image file is sent to the host computer 3 ({circle over (1)}). This image file also contains such information pieces as No. of each prober 1, Lot No. and Wafer No.

[0115] (42) The PC for probe trace centralized management constantly receives and displays the image provided from the prober 1 ({circle over (2)}). Here there is performed an acknowledging work by on-line.

[0116] (43) The worker who has acknowledged the probe trace sends adjustment data from the probe trace image to the prober 1 through the PC 6 for probe trace centralized management ({circle over (3)}). Together with this data transmission it is also possible to transmit an operation stop instruction for the prober 1.

[0117] (44) Upon receipt of the adjustment data the prober 1 corrects the probing position ({circle over (4)}). It is also possible for the prober 1 to receive an operation stop instruction.

[0118] (45) The above operations (41) to (44) are repeated until the end of the probing work.

[0119] (46) The probe trace image is managed and preserved in lot/wafer unit within a disc of the host computer 3. For the acknowledgment of a probe trace at the time of jig change and parameter change, a dummy chip is provided and set in advance.

[0120] Next, an example of the trouble detection/operation monitor function will be described below with reference to FIG. 12, which is a block diagram for illustrating the same function.

[0121] As shown in FIG. 12, the trouble detection and operation monitor is for plural testers 2 and probers 1 for example in the configuration including probers 1, testers 2, host computer 3, PC 7 for test results collection, PC 9 for operation monitor, operation monitors 10, and PC 11 for trouble detection/operation monitor display. The trouble detecting function is for detecting troubles such as probe contact imperfection and a lowering of yield on a real time basis from the test results information provided to the host computer 3 from each tester 2 or the PC 7 for test results collection.

[0122] (51) The operation monitors 10 each send information pieces such as operation, fault (including faults of testers and probers) and error stop constantly to the host computer 3 through the PC 9 for operation monitor ({circle over (1)}).

[0123] (52) The PC 7 for test results collection or each tester 2 sends test results information to the host computer 3 in lot No./wafer No. unit on a real time basis ({circle over (2)}).

[0124] (53) The PC 11 for trouble detection/operation monitor display receives and displays operation information and trouble information of test results ({circle over (3)}).

[0125] Next, an example of the automatic lot conveying and lot No. setting function will be described below with reference to FIG. 13, which is a block diagram for illustrating the same function.

[0126] As shown in FIG. 13, the automatic lot conveying and lot No. setting function is for plural testers 2 and probers 1 for example in the configuration including probers 1, testers 2, host computer 3, PC 4 for manufacturing specification acceptance, PC 7 for test results collection, PC 9 for operation monitor, and operation monitors 10, in the probe inspection system shown in FIG. 4, further including a before-check stock 14, an after-check stock 15, and an arm robot 16.

[0127] (61) Each operation monitor 10 transmits information such as operation, fault (including faults of testers 1 and probers 1), and error stop constantly to the host computer 3 ({circle over (1)}).

[0128] (62) When processing is over in the unit of wafer, the PC 7 for test results collection or each tester 2 transmits processing information such as lot No. and wafer No. ({circle over (2)}).

[0129] (63) The PC 4 for manufacturing specification acceptance receives information pieces such as operation, fault and error stop, as well as wafer processing information (data of the above 61 and 62) ({circle over (3)}).

[0130] (64) The PC 4 for manufacturing specification acceptance anticipates a lot completion time of each prober 1 and a loading jig and provides a checking prober 1 with an automatic conveyance command for a cassette acceptance lot stocked in the before-check stock 14 ({circle over (4)}).

[0131] (65) Upon completion of the lot processing the prober 1 issues a cassette replace command to the arm robot 16 ({circle over (5)}).

[0132] (66) The arm robot 16 reads lot No. ({circle over (6)}).

[0133] (67) The arm robot 16 sends lot change, lot No. and probe check start command to the prober 1 ({circle over (7)}).

[0134] (68) The cassette of the lot for which the probe check has been completed is conveyed to the after-check stock 15 automatically ({circle over (8)}).

[0135] The functions described above, i.e., automatic program load, prober's automatic jig change, automatic parameter setting, collection of test results, probe trace centralized management and control, trouble detection and operation monitor, and automatic lot conveyance and lot No. setting, are all required in case of making the interior of the wafer testing step unmanned and modifying the prober's software to effect a continuous lot check for a variety of items, but in case of performing only a continuous lot check for a variety of items without making the interior unmanned, such functions as automatic program load, prober's automatic jig change and automatic parameter setting, and test results collection are essential. It is not always necessary to provide such functions as probe trace centralized management and control, trouble detection and operation monitor, and automatic lot conveyance and lot No. setting, but the provision of those functions will be effective. In case of performing a continuous lot check while fixing an item, only the test results collecting function is essential, and as to the other functions, the provision thereof will be effective.

[0136] Thus, according to the semiconductor integrated circuit device fabricating method of this embodiment, the following effects can be obtained by connecting through the network 12 all of the probers 1, testers 2, host computer 3, PC 4 for manufacturing specification acceptance, PC 5 for post-step delivery, PC 6 for probe trace centralized control, PC 7 for test results collection, PC 9 for operation monitor, operation monitors 10, and PC 11 for trouble detection/operation monitor display.

[0137] (1) By managing the manufacturing specification in the probe inspection step unitarily in the unit of lot or wafer as automatic load data, manufacturing specification information including probe check test program and test pattern can be fed to each tester 2 automatically.

[0138] (2) In each tester 2 it is possible to select required information such as test program and test pattern on the basis of automatic load data in probe check and also possible to automatically change item parameter and measurement temperature in each prober 1, which change can also be done by the prober alone.

[0139] (3) By managing test results in the network 12 with PC 7 for test results collection, etc. connected thereto it is possible to abolish the storage of probe check results to a storage medium and collect probe check results continuously.

[0140] (4) By automating the lot switching work in each prober 1 in terms of a continuous operation, the lot switching work can normally be done automatically, whereby the time required for the lot switching work can be shortened, wait of workers can be diminished, and the tester stop time can be made zero.

[0141] (5) Since automatic load data are managed in the unit of lot within a cassette in terms of a representative lot No., even when plural lots and plural items are accommodated within one cassette, it becomes possible to automatically change test program and lot No., so that it is possible to reduce the number of cassettes, diminish the working load, and improve the working efficiency.

[0142] (6) In the probe inspection step, test programs corresponding to various items can be changed automatically at the time of changing lots, so the method in question can be applied particularly to a multi-item production in the unit of prober.

[0143] (7) Since it is possible to reduce the working time in the probe inspection step, it is possible to reduce the number of workers in the wafer testing step and further realize an unmanned construction.

[0144] (8) A trouble of test results and the operating condition of each tester can be checked on a real time basis.

[0145] (9) A machine No. for an accepted lot can be indicated easily.

[0146] Although the present invention has been described above concretely by way of embodiments thereof, it goes without saying that the present invention is not limited to those embodiments and that various modifications may be made within the scope not departing from the gist of the invention.

[0147] The following is a brief description of effects obtained by typical inventions out of those disposed herein.

[0148] (1) By building a network including probers, testers, manufacturing specification management, testing step control and test results management and by modifying the prober's software, plural lots of various items can be probe-checked continuously prober by prober, so that it is possible to surely (quantitatively) diminish the wait of workers and working load, with consequent improvement of the tester working efficiency.

[0149] (2) Since a network is constructed and plural lots and items can be accommodated within a single cassette to effect probe inspection, the resulting decrease in the number of cassettes and in the working load permits improvement of the tester working efficiency. 

What is claimed is:
 1. A method of fabricating a semiconductor integrated circuit device, comprising the steps of: (a) forming a predetermined integrated circuit on a wafer; (b) replacing a predetermined cassette with another cassette and subjecting the wafer to an electrical characteristic test after the end of processing of the predetermined cassette as one cassette out of plural cassettes each accommodating the wafer with the integrated circuit device formed thereon; and (c) shipping as product the wafer if judged to be non-defective as a result of the electrical characteristic test.
 2. The method according to claim 1, wherein, in the step (b), after the end of the electrical characteristic test of a first cassette and during the electrical characteristic test of a second cassette, out of the plural cassettes, the first cassette is made replaceable with a third cassette, thereby permitting a continuous execution of the electrical characteristic test for the wafers accommodated in the plural cassettes.
 3. The method according to claim 2, wherein the electrical characteristic test is probe check.
 4. A method of fabricating a semiconductor integrated circuit device, comprising the steps of: (a) forming a predetermined integrated circuit on a wafer; (b) automatically changing acceptance item data associated with the wafer formed with the integrated circuit thereon to a test program corresponding to each item lot by lot or wafer by wafer in a unitarily managed state on a network and subjecting the wafer to an electrical characteristic test; and (c) shipping as product the wafer if judged to be non-defective as a result of the electrical characteristic test.
 5. The method according to claim 4, wherein in the step (b), if the replacement of a jig is needed correspondingly to each item, the jig is changed and controlled automatically.
 6. The method according to claim 5, wherein the electrical characteristic test is probe check.
 7. A method of fabricating a semiconductor integrated circuit device, comprising the steps of: (a) forming a predetermined integrated circuit on a wafer; (b) subjecting the wafer with the integrated circuit formed thereon to an electrical characteristic test while checking off-line probe trace image data of a prober for the wafer; and (c) shipping as product the wafer if judged to be non-defective as a result of the electrical characteristic test.
 8. The method according to claim 7, wherein in the step (b), a probing position of the prober is acknowledged, corrected and controlled on a network on the basis of the result of having checked the probe trace image data.
 9. The method according to claim 8, wherein the electrical characteristic test is probe check.
 10. A method of fabricating a semiconductor integrated circuit device, comprising the steps of: (a) forming a predetermined integrated circuit on a wafer; (b) making, when the wafer with the integrated circuit formed thereon is accommodated in plural items within a cassette, an automatic change to a test program corresponding to each of the items and subjecting the wafer to an electrical characteristic test; and (c) shipping as product the wafer if judged to be non-defective as a result of the electrical characteristic test.
 11. The method according to claim 10, wherein in the step (b), data of plural items and plural lots accommodated within the cassette are managed unitarily on a network.
 12. The method according to claim 11, wherein the electrical characteristic test is probe check.
 13. A method of testing a semiconductor integrated circuit device, comprising the steps of: (a) providing a wafer with a predetermined integrated circuit formed thereon; (b) replacing a predetermined cassette with another cassette and subjecting the wafer to an electrical characteristic test after the end of processing of the predetermined cassette as one cassette out of plural cassettes each accommodating the wafer with the integrated circuit formed thereon; and (c) regarding as products chips judged to be non-defective as a result of the electrical characteristic test.
 14. The method according to claim 13, wherein in the step of conducting the electrical characteristic test, after the end of the test of a first cassette and during the test of a second cassette, out of the plural cassettes, the first cassette is made replaceable with a third cassette, thereby permitting a continuous execution of the electrical characteristic test for the wafers accommodated in the plural cassettes.
 15. The method according to claim 14, wherein the electrical characteristic test is probe check.
 16. A method of testing a semiconductor integrated circuit device, comprising the steps of: (a) providing a wafer with a predetermined integrated circuit formed thereon; (b) automatically changing acceptance item data associated with the wafer formed with the integrated circuit thereon to a test program corresponding to each item lot by lot or wafer by wafer in a unitarily managed state on a network and subjecting the wafer to an electrical characteristic test; and (c) regarding as products chips judged to be non-defective as a result of the electrical characteristic test.
 17. The method according to claim 16, wherein in the step of conducting the electrical characteristic test, if the replacement of a jig is needed correspondingly to each item, the jig is changed and controlled automatically.
 18. The method according to claim 17, wherein the electrical characteristic test is probe check.
 19. A method of testing a semiconductor integrated circuit device, comprising the steps of: (a) providing a wafer with a predetermined integrated circuit formed thereon; (b) subjecting the wafer with the integrated circuit formed thereon to an electrical characteristic test while checking off-line probe test image data of a prober for the wafer; and (c) regarding as products chips judged to be non-defective as a result of the electrical characteristic test.
 20. The method according to claim 19, wherein in the step of conducting the electrical characteristic test, a probing position of the prober is acknowledged, corrected and controlled on a network on the basis of the result of having checked the probe trace image data.
 21. The method according to claim 20, wherein the electrical characteristic test is probe check.
 22. A method of testing a semiconductor integrated circuit device, comprising the steps of: (a) providing a wafer with a predetermined integrated circuit formed thereon; (b) automatically changing a test program corresponding to each of the items when the wafer with the integrated circuit formed thereon is accommodated in plural items within a cassette, and subjecting the wafer to an electrical characteristic test; and (c) regarding as products chips judged to be non-defective as a result of the electrical characteristic test.
 23. The method according to claim 22, wherein in the step of conducting the electrical characteristic test data of plural items and plural dots accommodated within the cassette are managed unitarily on a network.
 24. The method according to claim 23, wherein the electrical characteristic test is probe check. 